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Category:Atmospheric Pressure
Service Hotline:400 0061 1152
Features
PT-5ST
Cavity material: stainless steel surface treatment
Power supply: AC220V
Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)
RF power supply: 0-300W adjustable (RF matching integrated)
RF frequency: 13.56MHz
Frequency offset: less than 0.2KHz
Characteristic impedance: 50 ohms, automatic matching
Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)
Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)
Gas flow rate: 10-300ml/min (adjustable)
Process control: PLC man-machine interface automatic and manual mode
Cleaning time: 1-99999 seconds adjustable
Power size 10%-100% adjustable
Inner cavity size Φ150×270Lmm 5L
Dimensions: 560 × 540 × 1250mm L × W × H
Vacuum pump: 2XZ-4 (pumping speed 2L/S)
Vacuum chamber temperature: less than 30 ° C
Cooling method: forced air cooling
Features
PT-5ST
Cavity material: stainless steel surface treatment
Power supply: AC220V
Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)
RF power supply: 0-300W adjustable (RF matching integrated)
RF frequency: 13.56MHz
Frequency offset: less than 0.2KHz
Characteristic impedance: 50 ohms, automatic matching
Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)
Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)
Gas flow rate: 10-300ml/min (adjustable)
Process control: PLC man-machine interface automatic and manual mode
Cleaning time: 1-99999 seconds adjustable
Power size 10%-100% adjustable
Inner cavity size Φ150×270Lmm 5L
Dimensions: 560 × 540 × 1250mm L × W × H
Vacuum pump: 2XZ-4 (pumping speed 2L/S)
Vacuum chamber temperature: less than 30 ° C
Cooling method: forced air cooling